The Molecular Dynamic method for simulation of ion implantation into crystal iron is applied. Visualization of implanted ion trajectories permits understanding of the difference between the processes of ion penetration into monocrystal and policrystal iron. It is shown that the distribution of the nitrogen ions implanted into policrystal iron differs significantly from that obtained for the monocrystal one. It is demonstrated that the space distribution of implanted nitrogen atoms in the policrystal case coincides well with the experimental data.
Keywords:
Molecular Dynamic method, Ion implantation .